I'm surprised to see a typical Chinese "self-media" article being shared here, coz I myself see these as nothing more than gossip blogs, so please take them with huge amount of salt or just avoid it. At least in my experience these are highly refined entertainment product with little to no regard to what's fact, opinion and pure made-up bullshit, their only goal is to maximize click numbers, thus more often than not…
Nonetheless , I was unaware of TSMC and ASML making a lithography breakthrough before EUV and so that at least is valuable information.
https://en.wikipedia.org/wiki/Immersion_lithography
https://en.m.wikipedia.org/wiki/Burn-Jeng_Lin
Myself, am amused how the translators did not consult English sources and also how the writers of the wikipedia article probably didn’t know about the analogy to immersion microscope objectives. This industry is curiously insular.