Wow, 7 nanometer is incredible! I wonder how small they can get silicon / silicon-germanium based chips before we have to resort to other techniques such as light processors (since light can be closer and even cross each other without issue). 10 nanometers that they're introducing next year is also incredible, at least to me since I'm not a hardware engineer and can't imagine how difficult manufacturing these are.
I could be wrong, but I think optical processors would have serious diffraction problems with a 7 nm feature size, since the wavelength of blue light is somewhere around 300 nm. As far as fabrication, one problem is that obviously you aren't using visible light to etch features on your wafers. The x-rays must be fun to work with... Not to mention, your photoresist would have to resist x-rays. Getting x-ray-resisting…
(tldr: 193nm light works down to 28nm lambda; progress requires moving further into UV and/or use immersing in liquid with different refractive index)