Everyone talks about the machine that makes the chips, but I’ve never heard mentioned the machine that makes the machine that makes the chips. (I guess it’s probably just a bunch of regular machines, but it feels like there’s got to be some special sauce in there somewhere)
Mostly these machines are assembled from a combination of proprietary parts manufactured using regular machine tools by contract manufacturers, and from sub-units purchased from specialist suppliers. For example: proprietary parts including optics, wafer chucks, process chambers, structural panels, etc are manufactured to spec by contractors. Pumps, valves, motion control boxes, wafer robots, loadports, servers, etc…
I've read that it would take China at least 10 years to get to ASML's current level. It might not be magic but there must be a lot of unknowns when starting from scratch.