If i were TCMS, i would not invest in Germany. But as a german, living in Germany, i am happy that they consider an investment in Germany.
I wouldn't be as harsh, but indeed that decision is a bit weird. They cannot really count on cheap labour, or "friendly" economic incentives. And seeing the case of Tesla factory, it's not so easy and fast. One great thing about Germany is the central location within EU with good logistics overall. Not sure it matters for semiconductor manufacturing.
Its not actually delayed much. The incredibly optimistic plan was to be ready in September, but that was Elon Time.
So far the bureaucracy has not really held them back that much.
If you compare progress in China, Texas and Berlin so far its not clear that Berlin is meaningfully slower.