Earlier quoted context omitted.
EUV is hard, but isn't part of the reason why only ASML can make those machines because of the CRADA they have with DOE as a member of the EUV LLC? I believe this agreement was why ASML wasn't allowed to sell their solution to China recently. I bet Intel will have no trouble buying EUV to bring in-house - especially if that serves US strategic interests.
ASML only makes a few machines every year, you can't just buy them off the shelf IMHO banning sales of ASML's product to China is chest thumping protectionist nonsense - if you're worried about the rise of China's military then you should be tangling their economy up more with that of the West so that they have more reasons not to go to war rather than driving them to be self sufficient.
That might have worked in the past but doesn't anymore as China actively counters this.
Selling them such machines will just bring short term production benefits to china and potentially gives them a chance to have it a bit easier to copy the technology.
But long term China will have it's own production methods and for it's military they will only use this sources. Currently they are at 28nm as far as I know. Which might be still quite a bit away from stat or the art but is already fairly useful for many use cases.