Earlier quoted context omitted.
I think an important difference is that EUV exists now.
That’s how you make the chip. I’m not doubting that you can get manufacturing smaller, for a while[0]. But will it still work? You’re getting into the domain where electrons start tunneling across transistors and such. There is a wall that we will hit where lithography can take us no further—we’ll need atomic precision to break through that wall. It’s just a question of where that wall is... [0]: Higher frequency UV…
This is something being said every few years. There were times when people were telling of 1 micron being "the wall."