I've been trying to build deep tech startups in Germany for 6 years. I managed to sell the first one I built to a US company (for a very small amount of money) and started afresh after taking a break as an employee. Right now I'm at the point of giving up again because it's so damn hard to find customers here. In my opinion, for deep tech startups the problem is not primarily access to capital but access to customers…
I‘d have been eligible for EXIST, but that program is a bad joke. 100k for 3 persons for one year before tax? C‘mon. That is financial sucide, if you’re in tech these days.
On top of that the program pays about 50k (?) for additional expenses, which you can use to e.g. rent an office, hire freelancers or cover legal costs.
For comparision, YC gives you 150k for a team of usually 2-3 people, and living expenses in SV are way higher than in Germany. So I wouldn't consider it a "bad joke" personally. Also, while the tutoring is not as good as YC some universities (especially TU Munich / LMU Munich and TU Berlin) provide really excellent mentoring, so I'd say overall it is a great program.
I'm just bummed out that nothing comparable exists for people with longer industry/work experience.