When these types of things are funded one always gets the sinking feeling that the money is just getting stolen and/or wasted by savvy insiders who know how to write grants or who know the right people. In fact, I think that's a reasonable assumption and some proof is required to show that it is not the case.
It's hard to fake a building going up.
Getting the enough ASML machines to supply a fab for an advanced process (and they have a backlog that is almost a decade long), starting up the whole complex logistical process to feed the fab (with lots of single source suppliers that are already committed to the existing fab capacity), getting all the necessary personal and skillsets started and getting the fab working, creating all the little feeder companies that are necessary around the fab, all that is hard work. It is is something that the US has largely lost most knowledge of how to do with all the outsourcing of industrial capacity.
And all this has to be done agains the upwind pressures of our service economy. Our politicians are largely lawyers, our financial sector focuses on short term returns, and our companies are rife with lawyers and MBA layers taking their cut out of the necessary investments in manufacturing and engineering. None of this is encouraging for the necessary long term slog to bring back industrial capacity, particularly something with as complex and deep logistical tail as semiconductor manufacturing.