Earlier quoted context omitted.
It is actually relatively easy to make a lithography machine that can etch features beyond what EUV can do. You simply use an electron scanning beam rather than photons. It's what the industry uses to create the masks used in lithography machines, but it could just as easily be used to make the actual chip. The problem is that it doesn't scale, at all. A scanning process is way too slow to be useful in mass productio…
Interesting! Makes me think of old 1990s X-Files episodes with chips under a microscope “smaller than we can produce”. I wonder if the government makes small batches of bespoke chips that are super miniature based on non scalable processes, and how far back in time would they have been able to develop 1nm chips for example?
Thus in the early 2000s you would be about 10 years ahead using electron scanning beam lithography. However that assumes you have all the tooling and transistor designs to actually create a working chip at that resolution. Showing you can etch a feature at nanometer scale is one thing, actually using it to create a working chip is a whole other ball game.
[1] https://spie.org/news/0599-double-exposure-makes-dense-high-...