When these types of things are funded one always gets the sinking feeling that the money is just getting stolen and/or wasted by savvy insiders who know how to write grants or who know the right people. In fact, I think that's a reasonable assumption and some proof is required to show that it is not the case.
That's definitely the feeling I get when I see the grants that get given out for Broadband to underserved areas. So much money gets spent on infrastructure for not much actual benefit.
Hopefully these fabs don't follow down that road. If nothing else, it'll be a lot easier to check and see if the objective were achieved, compared to broadband which is inherently much more decentralized.