Those krypton fluoride and argon fluoride lasers are exactly the lasers that use neon, even though "neon" is not in their name and their respective Wikipedia pages do not currently mention it. See for example this 2016 announcement from laser supplier Gigaphoton:
https://www.gigaphoton.com/en/news/3797
"Gigaphoton to Begin Field Evaluations for Neon Gas Recycling System “hTGM”"
In KrF and ArF excimer lasers, which are used in advanced semiconductor manufacturing processes, neon accounts for over 96% of laser gases used as the buffer gas. However, the cost of neon gas has risen sharply, reaching 5 to 20 times previous prices due to difficulty in obtaining it, a situation brought about by a worldwide neon supply shortage that has continued since 2015. In response to the situation, in July of 2015 Gigaphoton launched the "Neon Gas Rescue Program" in order to provide support to customers in sustaining stable high-volume manufacturing environments.
Of the three program options Gigaphoton previously announced plans of launching in 2016, the company has now completed development of its neon gas recycling system "hTGM," and will begin field evaluations of the system this month. hTGM makes it possible to reuse laser gas by connecting directly to the conduit of lasers in operation at semiconductor plants, collecting the used gas, removing impurities, and then re-injecting it back into the laser. This system is both eco-friendly and provides the greatest possible recycling rate without impacting the operation of laser equipment. hTGM also features an extremely efficient design that allows up to five lasers to be connected to a single unit. At present, the company has decided to begin evaluations for KrF lasers at user facilities from the end of February, after which it plans to progressively apply the system to ArF lasers as well.