I've been working on a project that auto generates c programs - sometimes up to 1.5m lines of code - in a single file (actually two files but the second is only 35 lines) Not open source but happy to share benchmarks if that would be useful.
Hardware 2016 12" MacBook (1.1GHz Core m3) Ubuntu 20.04 running in Docker Clang 9 -O0 optimisation (more optimisation increases the compile times a lot!)
0.53m LOC 41MB 34s
0.99m LOC 76MB 91s
1.44m LOC 110MB 167s
I suspect the code is relatively straightforward to compile - few function calls etc.