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they used "projection lithography, contact photolithography, and deep reactive ion etching –DRIE- to fabricate silicon-based TNT devices. not clear what's proprietary.

see supplemental data - https://images.nature.com/full/nature-assets/nnano/journal/v...

here are the supplemental data that have been released as "Topical tissue nano-transfection mediates non-viral stroma reprogramming and rescue" http://www.nature.com/nnano/journal/…

I don't believe that patent is the relevant one.